摘要
近年来,在低气压、低温等离子体研究和应用中的一个重要发展是微波电子回旋共振放电。由于它是一种无极放电,能够在低气压下产生高密度、高电离度、大体积均匀的等离子体,所以在等离子体物理研究,表面处理和薄膜制备等应用中,成为一个十分引人注目的新领域。本文综述了ECR放电的基本物理过程和实验研究概况,介绍了ECR等离子体在表面处理、镀膜和离子源等方面应用的最新结果。
A recent, important development in low-pressure and low-temperature plasma processing is microwave electron cyclotron resonance ( ECR ) discharge. Its lack of electrodes and its ability to create uniform plasma of high density, high ionization rate and big volume make it an attractive new area in plasma physics studies, surface processing and thin-film deposition applications. This article reviews the basic physics of ECR discharge and experimental research, and describes new applications of ECR plasma in surface processing, plasma coating and ion source.
出处
《物理学进展》
CSCD
北大核心
1992年第1期38-62,共25页
Progress In Physics
