摘要
采用混合模型求解了ＥＣＲ等离子体源中的各种物理参量，着重研究了中性气压、微波功率对等离子体参数（如等离子体密度、电子温度、等离子体电势）以及离子能量和方向角分布的影响，并讨论了与之相关的均匀性。
おany kinds of parameters of a typical electroncyclotronresonace(ECR) plasma source have been calculated using a twodimensional hybridmodel. The effects of pressure and microwave power on various plasma quantities (plasma density, electron temperature, plasma potential, ion energy and angle distribution) are investigated. Some issues related to dependence of uniformity and anisotropy are discussed correspondingly.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1998年第2期36-40,共5页
Nuclear Fusion and Plasma Physics
基金
国家自然科学基金
LWTZ-1298经费
关键词
ECR
等离子体源
粒子模拟
参数
数值模拟
ECR plasma Particle simulation Ion energy distribution Ion angular distribution
