摘要
溅射薄膜材料应用很广泛 ,其中薄膜的附着性是影响薄膜材料质量的重要因素 ,膜 /基界面结合强度是制约薄膜材料实际应用的关键之一。本文综述了关于溅射薄膜附着性能的研究进展 ,总结了影响附着性的主要工艺因素 ,为改善薄膜质量提供参考依据。
The application of sputtered thin films is very wide,and the adhesion of these thin films is an important fact to affect the quality of these thin film materials.The binding force between the interface of film and substrate restricts the use of these thin film materials.Progress of the research on adhesion and interface of sputtered thin films is reviewed,the main process parameters to affect the adhesion are summarized and a reference for improving the properties of the thin films is provided in this paper.
出处
《金属热处理》
CAS
CSCD
北大核心
2003年第1期29-31,共3页
Heat Treatment of Metals
基金
核燃料及材料国家重点实验室基金 (51 4 81 0 80 1 0 1SC0 1 0 1 )
