摘要
磁控溅射薄膜技术的应用日趋广泛,溅射薄膜的附着性是制约薄膜性能和使用效果的关键因素。本文结合作者进行的研究,参考国内外参考资料和文献,对薄膜附着性的影响因素做了综合评述,为提高和改善薄膜使用性能提供指导和参考。
The application of the technologies of magnetron sputtering thin films is very wide now, and the adhesion performance of film is an important factor to affect the quality and application result of the film. Combining the studies having been done by the writer with the references from home and abroad, the main process parameters to affect the adhesion of the film are summarized in this paper and a reference and direction for improving the properties of thin films is provided.
出处
《工具技术》
北大核心
2007年第10期20-23,共4页
Tool Engineering
基金
国家自然科学基金资助项目(项目编号:50475133)
关键词
磁控溅射
薄膜
附着性
magnetron sputtering, thin film, adhesion
