摘要
介绍了高纯铝及其合金的技术特点,分析了其夹渣和气体含量对溅射镀膜的影响。研究表明,高纯铝及合金中的夹渣存在一临界尺寸,只有当夹渣尺寸超过这一临界尺寸时,夹渣和气体才会影响薄膜质量。当前的除气除渣工艺技术可满足溅射靶材用高纯铝及合金的熔铸生产。
The specifications of high pure A1 alloy were introduced and the effect of slag and gas in ingots to the film was analyzed. The research indicates that a critical size of slag in ingots can be found. The sputtering film should be affected by the slag and gas in target when the size of slag is above the critical size. The current meting and casting technologies can satisfy the production of high pure A1 alloys just strictly keeping the cleaning circumstance.
出处
《热加工工艺》
CSCD
北大核心
2014年第4期46-50,共5页
Hot Working Technology
基金
国家863课题"集成电路制造用超高纯铝/铝合金靶材制造技术"(2008AA031802)
关键词
高纯铝
溅射薄膜
夹渣
除气
high pure AI
sputtering film
slag
degassing
