摘要
本文介绍了溅射镀膜的基本原理，溅射镀膜工艺及其在各方面的应用实例。
In this paper,basic principle. manufacturing technology of magnetron - sputtering thinfilm wereintroduced, and the practical examples of its application were also given in several fact.
出处
《电子机械工程》
1999年第3期58-60,64,共4页
Electro-Mechanical Engineering
