摘要
采用低能的短脉冲激光束聚焦到高压阴极上触发BRV型真空火花软X线源。本文与传统的三电极滑动电火花触发装置作了比较，通过实验研究探讨了该触发方式所具有的实用性和优势。
The BRV-type vacuum spark soft x-ray source has been triggered by focus-ing the low energy short pulse laser beam onto the high voltage cathode. Themethod is compared with the traditional trielectrode sliding spark triggering de-vice. According to the experimental research the practicality and advantages ofthe method are described
出处
《微细加工技术》
1997年第3期20-26,共7页
Microfabrication Technology
基金
博士后基金
