摘要
Al_2O_3光电二极管由于光谱响应波段较宽,性能稳定,经稀有气体电离室定标后,常用作软X线-真空紫外波段的光谱辐射传递标堆探测器。描述我们研制的Al_2O_3光电二极管的结构原理及Al_2O_3光阴极制备工艺,讨论性能测试方法与装置,给出测试结果。
Due to the wide spectral responsivity and the excellent perform- ance, the photodiode with Al_2O_3 photocathode is often used as a tra- nsfer standard detector of soft X-ray and Vacuum Ultraviolet spec- tral range. This paper describes the operating principle and the str- ucture of Al_2O_3 photodiode developed in our Lab, as well as its ma- nufacturing technology, discusses the method and equipment for the performance evaluation of the Al_2O_3 photodiode, and gives the meas- urement results.
出处
《光学机械》
CSCD
1991年第3期1-5,共5页
基金
国宗自然科学基金
