摘要
回顾了近50多年来中国真空计量的发展历史。内容包括真空(全压力)测量与校准、分压力测量与校准、气体微流量测量与校准,从中可对中国真空计量的历史渊源和现状有一个完整的了解。
The developments of vacuum metrology in China during the past 50 years are reviewed. It include vacuum (total pressure) measurement and calibration, partial pressure measurement and calibration, and gas micro-flow measurement and calibration. From which the historical developments and the status of vacuum metrology in China can be found entirely.
出处
《真空与低温》
2004年第1期6-16,共11页
Vacuum and Cryogenics
关键词
中国
真空计量
分压力
气体微流量
校准
vacuum metrology
total pressure
partial pressure
gas micro-flow (leak rate)
