摘要
真空计量学已发展成为计量学的一个新的独立分支,其研究内容已从传统的全压力测量与校准扩展到分压力测量与校准、气体微流量(漏率)测量与校准。描述了这3个方面的最新进展,从中可看出真空计量学的现状与发展趋势。
Vacuum metrology has been developed to be a new branch of metrology, whose concerned fields have been extended from the traditional total pressure measurement and calibration to the partial pressure measurement and calibration, and the gas micro-flow (leak rate) measurement and calibration. The latest developments of the fields are described, from which the current status and developing trend of vacuum metrology can be found.
出处
《真空与低温》
2003年第3期125-133,174,共10页
Vacuum and Cryogenics
