摘要
在对静电激励硅微机械谐振真空传感器研究的基础上，实现了一种新型的粘滞型谐振真空计。并给出了理论分析和实验结果。测试表明，其有效量程为1～1．33×103Pa。
A new type of resonant viscosity vacuum gauge based on the electrostatically excited silicon micromechanical resonant vacuum sensor has been developed,that can measure the pressures over a range from 1Pa to 1. 33 ×103 Pa. The theoretical analysis and the experimental results are presented.
出处
《真空科学与技术》
CSCD
北大核心
1997年第3期153-159,共7页
Vacuum Science and Technology
基金
国家重点自然科学基金!69236022
关键词
静电力
微机械
粘滞型
谐振真空计
硅微加工
Electrostatic force, Micromachine, Resonant vacuum sensor, Closed-loop oscillating circuit,Resonant viscosity vacuum gauge
