摘要
综述了对真空计量的需求与发展,其中包括对全压力、分压力、气体微流量、真空泵抽速、空间真空测量和特殊条件下对真空测量的需求,还包括对真空计量标准和测试设备的需求。
The requirement and development of vacuum metrology are summarized. The requirements for the total/partial pressure, gas micro-flow, vacuum measurement of space/special condition, as well as requirements for vacuum metrology standards and test equipment are included.
出处
《真空与低温》
2007年第3期125-127,共3页
Vacuum and Cryogenics
关键词
真空计量
真空测量
真空校准
vacuum metrology
vacuum measurement
vacuum calibration
