摘要
利用红外吸收气体直接吸收红外辐射的原理,设计出一种新型室温红外探测器。当密闭腔 内气体吸收红外辐射后,腔内压强增大使弹性薄膜形变,由以弹性薄膜为可动极板的微电容结构的电容变化量,可测得红外辐射的大小。采用微机械技术制作的探测器,对8-14mm红外辐射有灵敏、快速的响应,灵敏度≥2×10-3 pF/mW。
A room temperature IR detector is designed by using the principle of IR absorption gas directly absorbing IR radiation. After the gas within a closely sealed cavity absorbs IR radiation, the enlarged pressure intensity within the cavity makes the thin film deform. The size of IR radiation can be measured from the capacitive variation quantity of a micro-capacitance which uses the elastic thin film as movable polar plate. The detector made with MEMS technology is sensitive for 8 - 14 μm IR radiation and its sensitivity greater than or equal 2 × 10-3 pF/mW.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2004年第2期34-36,43,共4页
Opto-Electronic Engineering
基金
国家自然科学基金(69976004)
北京市自然科学基金(4982005)资助项目
关键词
红外探测器
微机械
弹性敏感薄膜
红外吸收气体
Infrared detector
Micromachine
Elastic sensitive film
Infrared absorption gas
