摘要
介绍一种基于标准硅工艺、采用电容读出方式微悬臂梁非制冷红外探测器的设计、制作及性能测试。用这两种热膨胀系数相差很大材料(氮化硅和铝)的薄膜做成的双材料徽悬臂梁在红外辐射下,温度升高并发生弯曲。通过检测微悬臂梁和衬底形成的一个可变电容变化可以得知微悬臂梁的弯曲情况,从而可以探测红外辐射的信息。利用外部测试设备对单元探测器进行测试表明微悬臂梁对红外辐射有很高的响应。
This paper presents the design and performance of a novel uncooled infrared （IR） detector, which is micro-fabricated basing on standard silicon process. Bi-material micro-cantilever made of silicon nitride （SiNx） and aluminum （A1） will bend when SiNx absorbs IR radiation and the micro-cantilever＇s temperature changes, because SiNx and A1 have different thermal expansion coefficients. The variable micro-capacitance that is made of micro-cantilever and substrate changes when the micro-cantilever bends. So the information of IR radiation will be obtained when the change of the variable micro-capacitance is detected. The test of the single detector by outer apparatus shows that the micro-cantilever detector has strong response to IR radiation.
出处
《红外技术》
CSCD
北大核心
2005年第5期388-392,共5页
Infrared Technology
关键词
非制冷红外探测器
微悬臂梁
微电容
Uncooled IR Detector： Micro-capacitance： Micro-cantilever
