摘要
介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理,描述了探测器的设计思想及制作工艺。该探测器采用密封于微气腔的特殊气体吸收红外辐射以改变探测器微电容的原理来进行红外探测,制作工艺采用微机械加工技术。对样品的测试表明这种红外探测器能探测红外信号。
A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced.The design idea and fabrication processes of this infrared detector are described in detail. The detector operates on infrared absorption by special gas sealed in a micro\|cavity, which results in its micro\|capacitance change. All fabrication processes are realized by MEMS technology. The experimental results indicate that the prototype samples have good sense of infrared signal.
出处
《红外与激光工程》
EI
CSCD
北大核心
2003年第5期452-455,共4页
Infrared and Laser Engineering
基金
国家自然科学基金资助项目(69976004和60276033)
北京市自然科学基金资助项目(4982005)
北京市教委科技发展项目(KM200310005009)
关键词
微机械
红外探测器
非制冷
红外吸收气体
Micromachine
Infrared detector
Uncool
Infrared sensitive gas
