摘要
研究了一种采用单线阵CCD测量二维工作台位移的方法。提供给CCD一个发光面形状为直角三角形的被拍摄目标,该目标固结在二维工作台上。使被拍摄目标的像在CCD光敏线上的宽度和位置随二维工作台的位置而改变,通过用一个单线阵CCD测量出目标像的宽度和位置,就可以同时测量出二维工作台在正交的X和Y方向的位移。相对传统的二维位移测量系统来说,所提出的系统具有结构简单,测量速度快和成本低的优点。
A new method to measure two orthogonal displacements of a twodimensions precision stage with only one linear CCD array is presented. The target is captured by CCD which is a rightangled triangle, and it is fixed on the twodimensions stage. The width of the target image and its location on linear CCD vary with the location of the stage. If the values of the width and the location are measured, X and Y direction displacements of the stage can be determined respectively and simultaneously. Compared with the traditional twodimensions displacement measurement system, the system demonstrated has many advantages: simple structure, fast measurement and low cost.
出处
《光学技术》
CAS
CSCD
2003年第6期710-712,共3页
Optical Technique
基金
973基金资助项目(G199903301)
