摘要
介绍一种采用ＣＣＤ为测量元件的光栅位移传感器的设计方法。该方法利用ＣＣＤ分辨率高、像素均匀的特点，对光栅刻线的像的移动进行精确定位和直接数字化，改变了以往对莫尔条纹进行位相细分的方法。该方法将细分和数字化在测量信号处理流程中的位置前移到光电转换环节，大大简化了后续电路，同时细分数也有大幅度提高，可以方便地实现数千倍的细分。在数据拼接时采用绝对栅距累加的方法，减小了光栅刻线质量对测量精度的影响。
A new strategy to design grating displacement sensor with linear CCD array is presented, which takes advantages of CCD's high acuity and equilibrium among every pixels. Using this method, the interval between grating lines can be subdivided directly and then measured. The traditional ways of subdividing moire fringes which need complex subsequent circuits is changed. Therefore the device can attain high resolution and precision fulfilled by the high quality of CCD with limited cost. The mass of circuits is also much simplified since the subdividing and digitizing functions are completed with image capture by CCD simultaneously. Moreover, the subdividing multiple is higher and up to thousands of times due to CCD's pixel number. Absolute distances between each line are added up to determine longer displacement so that the effect of grating etching quality is minimized.
出处
《光学技术》
CAS
CSCD
1999年第3期1-3,7,共4页
Optical Technique
关键词
CCD
光栅
直接细分
位移传感器
CCD
grating
direct subdividing
displacement sensor
