摘要
精密工作台是超大规模集成电路制造设备中的典型机构。在实验室设备的基础上，研制了一套精密工作台误差动态测试系统。该系统采用８０９８单叶机实现分频、比相和误差计算。系统集数据采集和处理为一体，比相范围大，测试精度高，柔性好。使用方便。
The precision working station is a typical mechanism in manufacturing equipment forVLSI, its accuracy being doubtlessly of significance. Based on the equipment in the authors’laboratory, a dynamic testing system for errors of precision working station is developed, inwhich frequency-division, phase-fitting,and error-calculation are carried out by an 8098 microcontroller, and hence the data collection and the data processing are integrated.The system is flexible and easy to use with a larger range of phase-fitting and a higher measuring accuracy.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第1期81-86,共6页
Optics and Precision Engineering
