摘要
水热法制备薄膜是近年来发展起来的一种很有潜力的液相制膜技术 ,在制备压电、铁电和氧化物薄膜等领域内的研究很活跃。本文介绍了水热法制备薄摸技术 。
Hydrothermal method is an attractive technique to prepare thin films in liquid phase developed in recent yerars,and was used in preparing piezoelectric,ferroelectric and oxide films.The hydrothermal technique for preparing thin films was introduced,and the relative results were reviewed in this paper.
出处
《硅酸盐通报》
CAS
CSCD
2002年第6期58-62,共5页
Bulletin of the Chinese Ceramic Society
基金
国家杰出青年科学基金资助 (批准号 :5 0 0 2 5 2 0 8)
关键词
水热法
制备
陶瓷薄膜
液相制膜
hydrothermal method hydrothermal technique thin films
