摘要
介绍了一种新型离子源———霍尔无栅离子源 ,并论述了其工作原理 .这种源不仅具有大束流、低能量和大辐照面积等优点 ,而且克服了现有的有栅离子源的技术局限性 .实验结果证明 ,霍尔无栅离子源的离子流分布均匀性较好 ,离子束能量在 30～ 12
This paper introduces a new end-Hall ion source,and describes the design of the hall accelerator. It not only has many advantages of large beam currents?low energies and big radiate area,but also overcomes technology limits of gridded ion source. In the test,it is found that the even nature of ion currents distribution is good and ion energy is in the range of 30～120eV. It has excellent properties and good application future.
出处
《西安工业学院学报》
2002年第4期297-299,共3页
Journal of Xi'an Institute of Technology
基金
陕西省重点实验室访问学者专项基金
