摘要
采用新型的离子注入技术———等离子体浸没式离子注入对４５ 钢进行了氮离子注入。测定了注入层的氮浓度俄歇剖面分布、显微硬度和摩擦性能，对磨损表面进行了扫描电镜分析。结果表明，采用等离子浸没式离子注入技术能够获得钢表面改性效果。
A new plasma immersion ion implantation (PIII) technique was used for implanting nitrogen ions in steel 45.The Auger depth profile of the nitrogen concentration,microhardness and tribological properties of the implanted layers were determined.The wearing surfaces were analysed with scanning electron microscopy.The results showed that the concentration and properties required for surface modification can be obtained by plasma immersion ion implantation technique.
出处
《金属热处理》
CAS
CSCD
北大核心
1999年第11期19-21,共3页
Heat Treatment of Metals
关键词
浸没式
离子注入
表面改性
plasma immersion ion implantation,surface modification
