摘要
以甲烷、氢气做为气源,利用微波等离子气相沉积的方法在硅片上沉积金刚石薄膜。研究了不同浓度的甲烷对金刚石薄膜形貌和晶向的影响。结果表明:当甲烷浓度为2.44%时,金刚石薄膜晶粒尺寸小,晶形较差,晶面取向以(111)、(220)面为主;甲烷浓度为0.50%时,金刚石薄膜晶粒尺寸较大,晶粒棱角分明,晶面取向以(111)面为主。
Diamond films were deposited bu using CH4/H2 gas system and silicond wafers as substrate in Microwave Plasma CVD （MPCVD） device. Diamond film morphology and the crystal orientation were studied with different methane concentration conditions. Results show that when the concentration of methane is 2.44%, the diamond grain size is small, crystal is poor, crystal plane orientation of （111） crystal , （220） plane based, methane concentration was 0. 50% , the diamond grain size is large, particle angular , crystal orientation （ 111 ） plane based
出处
《实验室科学》
2014年第4期17-18,22,共3页
Laboratory Science
基金
秦皇岛市科学技术研究与发展计划项目(项目编号:NO.201101A108)
