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[100]金刚石薄膜的辐照响应特性研究 被引量:3

Study on Irradiation Response of -oriented Diamond Film
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摘要 采用热丝辅助化学气相沉积(HFCVD)方法生长得到25μm厚的[100]取向金刚石膜,用以制备辐射探测器。在100 V偏压下,测得暗电流为16.1 nA,55Fe X射线(5.9 keV)和241Amα粒子(5.5 M eV)辐照下的净光电流分别为15.9nA和7.0nA。光电流随时间的变化先快速增加随后由于“pump ing”效应逐渐达到稳定。X射线和α粒子辐照下的平均电荷收集效率分别为45%和19%,并由Hecht理论计算得到对应的电荷收集距离为11.25μm和4.75μm。 A radiation detector was fabricated by [ 100 ] -oriented diamond film which was deposited by hot filament chemical vapor deposition (HFCVD) method. The thickness of the film was 25μm. Under a bias voltage of 100V, the dark current was 16. lnA . The net photocurrent was also obtained as 15.9 nA and 7.0 nA under the irradiation of ^55 Fe ( 5. 9 keV ) X-ray and ^241 Am ( 5. 5 MeV ) α particles, respectively. The photocurrent increased rapidly at first and reached stably for the "pumping" effect with the time elapsing. The charge collection efficiency was 45% (X-rays) and 19% (α particles), corresponding to the charge collection distance of 11.25 μm and 4.75 μm by calculating according to Hecht theory.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2006年第4期719-723,共5页 Journal of Synthetic Crystals
基金 国家自然科学基金(No.60577040) 上海应用材料研究与发展基金(0404) 上海市纳米专项(0452nm051 05nm05046) 上海市重点学科(T0101)资助
关键词 金刚石膜 辐射探测器 光电流 电荷收集效率 diamond film radiation detector photocurrent charge collection efficiency
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