摘要
根据非平衡热力学耦合模型理论首次计算得到了碳氢氮体系的金刚石生长的非平衡定态相图与近几年在国际上发表的该体系实验结果相符合，可以为今后的实验研究提供定量化的理论依据．根据理论相图讨论了系统压力和体系中氮的添加对金刚石薄膜淀积条件的影响．
Non-equilibrium stationary phase diagrams for diamond growth with nitrogen addition intothe reaction system were calculated and coordinate well with published experimental results.Therefore they can direct the experimental research on the subject. The effects of nitrogen addition on the deposition of diamond films were discussed by using the phase diagrams. The nitrogenaddition can accelerate the deposition rate of diamond films in two aspects: enhance the CH3concentration at the growth surface and accelerate the abstraction of H atoms covered the growthsurface sites.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第1期114-118,共5页
Journal of Inorganic Materials
基金
国家自然科学基金!59772029
863高科技基金!!863-715-010-0050
关键词
金刚石
相图
化学气相淀积
薄膜
含氮体系
diamond, phase diagram, chemical vapor deposition, nitrogen, film
