摘要
根据理论计算得到了碳氢氮体系低压金刚石生长非平衡定态相图，结果与实验数据相当符合，并通过相图和热力学计算讨论了氮原子含量对金刚石生长条件的影响以及在ＣＶＤ金刚石制备过程中提高金刚石薄膜生长速率的原因。
Non equilibrium diamond growth phase diagram for C H N system under low pressure was calculated based on non equilibrium thermodynamics, which coordinates well with published experimental results. The reasons for the fact that the addition of nitrogen atoms can speed up the diamond deposition rate were discussed by using the phase diagrams.
出处
《高技术通讯》
EI
CAS
CSCD
1998年第9期36-39,共4页
Chinese High Technology Letters
基金
863计划
国家自然科学基金
