摘要
对制备 AlN 的体系 AlCl_3-NH_3-N_2进行了热力学分析,确立了 AlN 粉末合成所需要的热力学条件.在700～1000℃下,利用无水 AlCl_3和 NH_3的化学气相淀积反应合成得到了高纯 AlN 超细粒子粉末,研究了反应温度、AlCl_3浓度和总流量等对 AlN 粉末理化性质的影响.实验确立了产物低温和高温热处理条件.
The system of AlCl_3-NH_3-N_2,which was used to synthesize AIN ultrafine particles,wasanalyzed thermodynamically,and the condition of AIN powder preparation was evaluated.Highpurity AIN ultrafine particles were synthesized by chemical vapor deposition of anhydrous AlCl_ 3and NH_3 at 700～1000 ℃.The effects of temperature,AlCl_3 concentration,and total flowrate on the properties of AIN powder were studied.The conditions of heat-treatment at lowand high temperatures for the products were determined by experiment.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第4期397-405,共9页
Journal of Inorganic Materials
关键词
化学气相淀积
超细粉末
氮化铝
Chemical vapor deposition
Ultrafine particles
Thermodynamics
