摘要
本文用ＨＦＣＶＤ法对在硬质合金衬底上生长金刚石薄膜的诸多影响因素，如衬底的预处理、碳源浓度和热丝及衬底温度等进行了系统地研究并最终找出在该衬底上生长金刚石薄膜的最佳生长条件。
Abstract Diamond coating on carboloy metal was prepared by HFCVD. It is found that many factors such as pretreatment of substrate, the concentration of acetone and the temperature of hot filament and substrate strongly influenced the growth process and properties of diamond film. Finally the best growth conditions of diamond coating on carboloy metal was found.
出处
《真空》
CAS
北大核心
1998年第4期17-22,共6页
Vacuum
