摘要
报道了原位红外吸收光谱在气相合成金刚石薄膜生长过程中的应用，研究了灯丝温度对原位红外吸收光谱和金刚石薄膜生长的影响。较高的灯丝温度使甲烷分解更充分，从而产生更多诸如Ｃ２Ｈ２等可能对金刚石薄膜生长有利的基团，导致金刚石薄膜质量和生长速率的提高。
In situ infrared absorption spectroscopy has been used to study chemical vapor deposition (CVD) diamond growth process. The effects of filament temperature on in situ infrared absorption and diamond film growth are investigated. We find that the absorption of CH 4 radicals is always exist while that of C 2H 2 can only be detected at filament temperatures higher than a threshold value, 1700℃. High filament temperature results in more C 2H 2 formation and CH 4 decomposition. At the same time, diamond films prepared at high filament temperature will have a higher diamond content and growth rate. We conclude that more decomposition in CH 4 will lead to high concentration C 2H 2 and hydrocarbon formation radicals which may benifit the high quality diamond film growth and promote growth rate.
出处
《高压物理学报》
EI
CAS
CSCD
北大核心
1996年第2期151-156,共6页
Chinese Journal of High Pressure Physics
基金
国家863高技术发展计划资助
关键词
吸收光谱
原位检测
金刚石
薄膜
in situ detection, absorption spectrum, diamond film, temperature.
