摘要
研究了准分子激光辐照对ＷＣ－６ｗｔ％Ｃｏ（ＹＧ６）硬质合金工具衬底沉积金刚石膜的影响。证实准分子激光辐照可产生钴选择性蒸发和表面粗糙化；从而有效地降低表面钴含量，消除钴对金刚石膜沉积的有害影响。硬质合金ＹＧ６工具衬底沉积金刚石薄膜工艺参数范围较窄，采用阶段沉积法可以得到质量良好，附着力强的金刚石薄膜。
Effect of excimer laser irradiation on CVD of diamond film on WC-600wt% Co hard metal substrate was studied. Co depletion via selective evaporation and surface roughened by the energetic laser beam was confirmed and was proved to be effective on the improvement of the quality and adhesion of the diamond film. It was found that the process parameters for diamond film deposition were much narrower than on other substrate. A novel method of step deposition was proposed for obtaining good quality and adhesive diamond films on YG6 hard metal substrate.
关键词
硬质合金
激光预处理
金刚石薄膜
CVD
hard alloy
laser pre-treatment
selective evaporation
diamond films deposition
