摘要
用载能氮离子束轰击纯铁镀钛膜样品，成功地形成了金黄色氨化钛薄膜。结果表明；注入剂量为０．５×１０１７Ｎ＋／ｃｍ２的混合样品表面颜色与纯金类似；氮离子束混合样品表面显微硬度及耐磨性都远优于纯铁基体，且随离子剂量的增加，混合样品的表面硬度和耐磨性也提高。
The TiN thin films are produced on the Ti plated iron samples by N ion beam mixing.The mechanical measurements show that the samples are of high hardness and good wear resistance after N ion beam mixing.The sample with0.5×1017N+/cm2ion beam mixing has a golden appearance and its reflectance curve within the range of visible spectrum resembles that of pure TiN.
出处
《核技术》
CAS
CSCD
北大核心
1994年第2期74-77,共4页
Nuclear Techniques
关键词
离子束混合
氮化钛
薄膜
磨损
Ion beam mixing
TiN thin films
Wear
Reflectance curve
