摘要
在金属衬底（Ａｌ、钢、铝－碳纤维、Ｎｉ３Ａｌ）上用离子束增强沉积形成氮硅化物的梯度薄膜．在薄膜的一侧有很高的电阻（１０７Ω），而在另一侧电阻根低（１Ω），在绝缘层和导电层之间电阻呈梯度变化．对梯度薄膜的组分、硬度、附着力、疲劳寿命、抗腐蚀能力和抗高温氧化性能进行了测试和分析．
Gradient thin films are useful for space and air crafts and for industries working in high temperature. teChnologies. The techniques for the preparation of these films were developed quickly during the last years. Ion Beam Enhanced Depostition (IBED) is one of powerful methods, which is a combination of ion implantation and physical vaPOr drpostion (PVD). The films synthesized by IBED have the advantages of sufficient adhesion to the substrate, easy control of chemical composition and thickness of the films and capability to synthesize compound films at low temperature. Deposition of silicon nitride films was carried out on an EATOM Z-200 IBED System. The gradient property, the fatigUe life, the corrosion resiStance and the oxidation bohavior of IBED St3N4 on metals were investigated.(1) Gradient property The result of spreading resistance measurement of Si3N4 / Ni shows. that there is a high resistance (more than 107 ohm) on one side, and a low rest+stance (only ≈ 1 ohm) on the other side of the sample Between the insulating and the metallic layer, the resistance changes gradually. From the results of AES measurement and computer simulation, we assume that this gradient thin film is composed of a very thin silicon enriched layer on the top, a stoichiometric Si3N4 insulating layer, a graded transition layer at the interface, and the substrate of nickel. The refractive index profile also showed the gradient property of the Si3N4 film synthesized by IBED on Si.(2) Fatigue life By using the three POint bending tests, we found at the first time that not only the initiation , but also the propagation of the fatigue crack could be suppressed by IBED of Si3N4 on steel. The gradient films are beneficial for improving the fatigue behavior of metal.(3) Cormsion resistance The corrosion protection Power of Si3N4 / Fi, St3N4 / Ni, St3N4 / Al-C fiber and Si3N4 / Ni3A1(B) formed by IBED in different solution has shown significant improvement because of the insulating characteristic and the good adhesion.(4) Oxidation behavior Isothermal and cyclic oxidation tests were carried out on nickel coupons and those coated with St3N. films at 1300K in a flow of pure oxygen at atmospheric pressure. It is concluded that applications of gradient films for improving the high temperature oxidation behavior are very effective.
出处
《材料研究学报》
EI
CAS
CSCD
1994年第1期61-66,共6页
Chinese Journal of Materials Research
基金
国家自然科学基金
关键词
离子束
增强沉积
梯度薄膜
Ion Beam Enhanced Deposition (IBED)
silicon nitride
gradient film
