摘要
通过对离子注入过程中表面碳膜结构及其对离子注入层各种性能(颜色、显微硬度和耐蚀性)影响的研究,得知了形成离子注入层表面碳膜及其影响离子注入层性能的机理。
The structure of carbon layer deposited on metal surface in ion implantation process and its effects on the properties of implantation layers were investigated . The mechanisms about both the formation of the carbon contamination and the above effects were discussed.
出处
《核技术》
CAS
CSCD
北大核心
1992年第12期705-709,共5页
Nuclear Techniques
关键词
离子注入
表面合金化
碳
沉积
Ion implantation Ion implantation modification Surface carbon layer Flux
