摘要
采用HRS-300A三极磁控反应溅射镀膜设备,可在W18Cr4V高速钢基体上涂覆一层4～5μm厚的硬质TiN膜。找到了一种显示TiN膜微观组织的方法。电镜观察表明,TiN膜由细密柱状晶体组成,是典型的沉积涂层形貌。用X射线衍射法测定的TiN膜的相组成,主要是TiN和Ti_2N。用涂层刀具加工零件,刀具耐用度提高一倍以上。
TiN Layers of 4～5μm thick were deposited on the substrateof high speed steel tools by HRS-300A magnetron sputtering coater.Ametallographic examination process of TiN layer has been carried out.TheSEM study denoted that TiN layer consists of fine,dense and columnargrowth of grains.It is the typical morphology of deposited layers.Phasecomposition of the layers is examined using X-ray diffraction,and is actuallycomposed of TiN and Ti_2N.The service life of tools deposited TiN may beincreased to two times.
出处
《金属热处理》
CAS
CSCD
北大核心
1990年第4期3-6,共4页
Heat Treatment of Metals
关键词
TIN涂层
相
组成
刀具
镀膜
deposited TiN layer
phase composition
tools
