摘要
在比较已有的几种低流速流体的流速流量测量方法基础上 ,提出一种利用与流速相关温差的测量方案 ,并用芯片集成方法构成流量传感器加以验证 ,实验结果与理论预期基本相符。该传感器的主要优点是在低流量条件下具有高灵敏度。
By surveying and evaluating several current measures, a new flow sensor suitable for low velocity fluid measurement is developed and tested, which works based on the flow-induced temperature differences detecting. The experimental results are consistent with theory well. The main advantage of the flow sensor is its high sensitivity within the range of small flow measurement.
出处
《传感技术学报》
CAS
CSCD
2004年第1期101-105,共5页
Chinese Journal of Sensors and Actuators
