摘要
本文介绍了利用恒定芯片温度原理工作的全集成式流量传感器,它由三部分组成.CMOS温度敏感级、CMOS运放和加热部分,这三部分由CMOS工艺集成在同一芯片上,不需附加工艺.本文在给出温度敏感级的理论分析和流量传感器工作原理的介绍后,报道了传感器用于气体流速(氮气)和液体(水)流速的测量结果,结果表明,该传感器具有如下特点:输出电平和灵敏度高(在传感器芯片温度T_c与流体温度了T_f之差为15℃、流速V_f为50cm/s的氮气条件下,传感器的输出可达500毫伏);响应时间快(在T_c-T_f=5℃、V_f=50cm/s时,响应时间为7秒);芯片尺寸小(2.02×1.62mm^2);成本低(因用普通工艺);用单5伏电源工作与微处理机自然接口等.对水流流速的试验还表明,该传感器特别适合于低流速水的测量.
A Fully integrated flow sensor utilizing constant chip temperature principle is presented.It is composed of CMOS temperature sensing stage,CMOS op.amp. and heating part, whichare integrated on one chip by a conventional CMOS process.After giving the theory analysisof the temperature sensing stage and the introduction of the principle of the flow sensor,measurement results of the flow velocity values of nitrogen and water by using the sensor arereported.The results show that the sensor has the following features: high output level andsensitivity (500mV output at V_t=50cm/s and T_c-T_f=15℃) as well as reasonable responsetime (7s at a step change of flow velocity in 50cm/s and T_c-T_f=5℃).The sensor chipsize is 2.02×1.62 mm and it works under a single 5 V power supply.
基金
国家自然科学基金(6866009)
关键词
集成传感器
流量传感器
CMOS
Sensor
Flow sensor
Integrated sensor
CMOS temperature sensor
