摘要
对ＣＭＯＳ流量传感器的传热特性进行了分析研究，提出在器件前后端之间采用隔热结构是提高器件灵敏度的一种有效方法，隔热槽长度是传感器灵敏度的关键参数。实验表明当隔热槽长度为１６５μｍ左右时，器件灵敏度最佳。
In this paper,the heat transfer characteristics of CMOS flow sensor have been investigated and a method to acquire high sensitive devices has been presented. The experiments show that the length of heat-insulated tank is very important to sensitivity of the CMOS flow sensor,and the device is most sensitive when the length is 165 um.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1995年第4期412-416,共5页
Research & Progress of SSE
