摘要
介绍了当前国内外微机械陀螺仪的研制现状,阐述了微机械陀螺仪的两种典型结构,指出了微机械陀螺仪的发展方向。微机械陀螺仪正朝着小型化和低成本方向发展,将会在集成式导航系统和运动控制系统中大量使用。
This paper summarizes the current state of MEMS gyro research, describes two kinds of MEMS gyro抯 typical structure up to date, and points out the developing trend of MEMS gyro. MEMS gyro is developing in the direction of miniature and low cost and largely applied to integrated navigation system and motion control system.
出处
《中国惯性技术学报》
EI
CSCD
2003年第5期67-72,共6页
Journal of Chinese Inertial Technology
