摘要
MEMS技术是一门新兴的技术 ,近年来 ,越来越受到世界各国的重视。主要介绍了MEMS的发展背景、研究内容、特点。
MEMS(micro electromechanical system) technology is an emerging technology. It is taken more and more seriously both inside and outside the country. In this paper, background, research, characteristic and developing status of MEMS technology are introduced summarily. Trend is analyzed.
出处
《传感器技术》
CSCD
北大核心
2001年第1期52-56,共5页
Journal of Transducer Technology
关键词
微电子机械系统
传感器
执行器
micro electromechanical system(MEMS)
sensor
actuator
developing status and trend
