摘要
简要介绍微机电系统中的微机械加工技术,主要包括硅表面微加工技术、硅体微加工技术、光刻及电铸和复制技术(LIGA)、准LIGA技术和快速成型技术等,并综述了这些技术的研究进展情况。
The microfabrication technique of Micro Electro Mechanical Systems(MEMS) is concisely introduced, which mainly includes micromachining techniques for silica surface and silica body, photolithograph, electroform, LIGA technique, quasi LIGA technique and rapid prototyping technique. The research progress of these techniques is also described.\;
出处
《真空与低温》
2003年第1期1-5,共5页
Vacuum and Cryogenics
关键词
微机电系统
微机械加工技术
微机械
Micro Electro Mechanical Systems(MEMS)
microfabrication technique
micromachine
