摘要
利用简单截面形状电极 ,建立在分层制造思想上的电极等损耗微细电火花加工技术是实现微三维结构微细加工的有效手段。分析了该方法的工艺特点 ;
Uniform electrode wear micro EDM based on laminar manufacture and using simple shape electrode is an effective method for 3D micro structure. This paper analyses its machining characteristics and studies the conditions that bring this technology into use, then gives the policy of electrode compensation in actual machining.
出处
《微细加工技术》
EI
2000年第1期71-74,78,共5页
Microfabrication Technology
关键词
微细电火花加工
微三维结构
微电子机械
Micro EDM
Laminar manufacture
3D Micro structure
Compensation
