摘要
热丝化学气相沉积（HFCVD）生长金刚石膜过程中,在热丝相关工艺参数取优化值的前提下,对热辐射平衡体系中衬底表面辐照度和衬底温度的空间分布进行了模拟计算,探讨了衬底横向热传导对衬底温度分布的影响.结果表明,在绝热边界和1000K恒温边界条件下,热传导都使衬底温度的空间分布均匀性明显优于纯热辐射下的温度分布.这些计算结果为大面积高质量金刚石膜的生长进一步提供了理论基础.
When the relative parameters of hot filaments were fixed at the optimal values, the irradiance distribution and the temperature distribution of substrate were simulated during the growing process HFCVD diamond films. Considering the effect of heat conduction, the substrate temperature distributions under the condition of adiabatic border and 1000 K isothermal border are more uniform than those in pure heat radiation system. All these results may provide the basis for the growth of diamond films in HFCVD.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
2002年第11期1228-1232,共5页
Acta Metallurgica Sinica
基金
国家自然科学基金八五重大攻关项目59292800
辽宁省科委资助项目
