摘要
用射频偏压磁控溅射法 ,在水冷透明聚脂胶片上制备出了附着力强的ZnO :Al (AluminiumdopedZincOxide ,AZO)透明导电膜 ,膜的最小电阻率为 1.11× 10 -3 Ωcm ,薄膜的透过率高于 85 % .薄膜为多晶纤锌矿结构 ,垂直于衬底的C轴具有 [0 0 2 ]方向的择优取向 .重点探讨了薄膜的结构、光电性质与衬底所加负偏压的关系 .
Good transparent conducting Aluminium doped Zinc Oxide films with good adherence were deposited on water_cooled polypropylene adipate substrates using bias r.f.magnetron sputtering.The films with resistivity as low as 1.11×10 -3 Ωcm and transmittance over 80% have been obtained by adjusting the bias voltage. The films are polycrystalline with a hexagonal wurtzite structure and a [002] preferred orientation. It was observed that the structure ,electrical and optical properties of films depend on the bias voltage applied to substrate table .
出处
《曲阜师范大学学报（自然科学版）》
CAS
2002年第4期59-63,共5页
Journal of Qufu Normal University(Natural Science)
基金
国家自然基金资助课题 (60 1760 2 1)
