摘要
在柔性衬底上制作的器件具有重量轻、柔软等优点,所以柔性透明导电薄膜成为当前的研究热点。柔性衬底存在不耐高温的缺点,从而限制了柔性透明导电薄膜的性能。总结了近年来对柔性衬底材料处理的方法,并介绍了柔性透明导电ITO薄膜和ZAO薄膜,分析了它们的研究现状,同时讨论了柔性薄膜的制备方法,最后对柔性透明TCO领域未来的研究和应用工作进行了展望。
Devices deposited on flexible substrates have some advantages such as weight-light, flexibility, etc. Therefore, flexible transparent conductive film has become a focus of research. Because flexible substrates can not endure high temperature, the properties of flexible transparent conductive film are limited. The treatments of flexible substrates are reviewed in this paper. Flexible transparent conductive ITO film,ZAO film and their research advances are described. Moreover, the preparation techniques are discussed. Finally, the future work to be done in TCO research and application fields is suggested.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2007年第3期119-122,129,共5页
Materials Reports
基金
江苏省自然科学基金资助项目(BK2004129)
关键词
柔性透明导电薄膜
柔性衬底
制备方法
ITO
ZAO
flexible transparent conductive film, flexible substrates, preparation methods, ITO, ZAO
