摘要
柔性透明导电薄膜ZAO具有优异的光电性能且资源丰富、成本低、对环境无污染,成为当前的研究热点。总结了近年来对柔性衬底材料处理的方法,分析了柔性透明导电薄膜的研究历史和现状。介绍了柔性透明导电薄膜ZAO的结构、光电特性、典型制备方法和应用前景。评述了柔性ZAO薄膜的研究现状,并对其近期研究和应用工作进行了展望。
Owing to its excellent optic-electronic properties, rich in resources, low cost and innocuity, flexible transparent conducting film ZAO becomes a focus of research. The treatments of flexible substrate are discussed, the history and development of flexible transparent conducting films are analyzed, the microstructure and properties of ZAO film, the typical preparation techniques, the application prospect are introduced, the research developments of this material, and the future work to be done in ZAO thin film research and application fields are reviewed.
出处
《半导体技术》
CAS
CSCD
北大核心
2008年第6期461-465,共5页
Semiconductor Technology
基金
国家自然科学基金资助项目(50402019)
关键词
ZAO薄膜
柔性衬底
透明导电薄膜
ZAO thin film
flexible substrate
flexible transparent conducting thin film
