摘要
用射频等离子体方法在玻璃基底上制备了类金刚石 (DLC)薄膜。采用拉曼光谱、可见紫外近红外光谱、红外光谱等手段对经γ射线 (其平均能量为 1 2 5MeV)辐照后的类金刚石薄膜中氢含量及其变化进行了分析。结果表明 ,随γ射线辐照剂量的增加 ,薄膜中SP3C H键数量明显减少 ,与此同时 ,薄膜中氢含量也随之减少。当辐照剂量达 1× 10 5Gy时 ,SP3C H键减少了约 5 0 %。利用光学带隙数据、完全抑制网络 (FCN)理论及相关计算得出膜中氢含量为 10 %～ 2 5 % ,且其含量随辐照剂量的增加而减少。随辐照剂量增加 ,类金刚石薄膜附着力增加及红外透过率的降低进一步验证了上述结论的正确性。
Diamond like carbon films, prepared by RF glow discharge on glass substrate, were irradiated by γ rays. The hydrogen content and the change of hydrogen content were analysed and confirmed by Raman spectroscopy, VIS UV NIR spectroscopy and infrared spectroscopy. It showed that the SP 3C H bond numbers in DLC films irradiated by γ rays were decreased obviously, and the decrease of hydrogen contents was deduced easily. When the γ rays irradiation doses reached 10×10 4 Gy, the numbers of SP 3C H bonds were decreased by about 50%. According to the data of optical gaps, fully constrainted networks (FCN) theory, and the relative calculation, the conclusions that the hydrogen content in DLC films is 10%～25% and is deceased with the increase of the γ rays irradiation doses can be reached. The adhesion and IR transmittance of the DLC films were increased and decreased with the irradiation doses respectively, and these conclusions confirm the correct of the above mentioned conclusions.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2002年第4期505-508,共4页
Acta Optica Sinica
基金
航空基金 (98G5 112 4 )资助课题
关键词
类金刚石薄膜
Γ射线辐照
光学带隙
完全抑制网络理论
氢含量
diamond like carbon films
γ rays irradiation
optical gaps
fully constrainted network stheory
hydrogen content
