摘要
采用微波等离子体方法在硅微尖上生长了金刚石膜，并利用ＳＥＭ和Ｘ射线衍射方法对金刚石膜进行了研究．
The diamond film on the silicon tips array was deposited by MW-PCVD technique. The samples obtained were investigated by SEM and X-ray diffraction technique. It is shown that the diamond film is (111) oriented.
出处
《吉林大学自然科学学报》
CSCD
1996年第3期59-61,共3页
Acta Scientiarum Naturalium Universitatis Jilinensis
