摘要
介绍了类金刚石薄膜的结构特征。
Abstract We
present the structure features of diamond like films,discuss the relation between the coefficients in
the preparation of diamond like films and analyse how these coefficients affect the structure and
property of the films in detail.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第6期1095-1102,共8页
Acta Physica Sinica
