摘要
在 Xe Cl准分子激光器中 ,采用定向棱镜作为端反射镜与平面输出镜构成激光器共振腔 ,获得了平顶高斯激光束输出 ,并具有腔镜高抗失调能力 ,改善了激光束质量。
A flattened Gaussian beam was obtained in the XeCl excimer lasers with a directional prism cavity, the beam quality was improved, and the ability of anti-disalignment of excimer lasers was increased.
出处
《激光与光电子学进展》
CSCD
2001年第10期20-23,共4页
Laser & Optoelectronics Progress