摘要
基于有限元和边界元耦合法 ,建立了一种新的求解微电子机械系统 (MEMS)中多能量场耦合问题的数值方法———加速松弛法。这种方法能有效地避免使用牛顿法时求解Jacobi方程的困难。算例表明 ,加速松弛法具有收敛速度快、稳定性好等特点。
The performance of most micromachined devices depends on the interaction between forces generated by a variety of mechanisms. Simulating this coupled domain problem is made more difficult by the fact that most microelectromechanical system(MEMS) devices are innately three dimensional and geometrically complicated. The numerical simulation analysis is very important to enhance the design abilities of designers and accelerate the development of MEMS industry. In order to get the best efficiency for coupled electromechanical analysis, it is desirable to use the fastest methods for each of the domains of analysis. Based on a combined finite element/boundary element method, this paper presents a methodology for solving three dimensional coupled domain problems in electrostatic mechanical systems. Using single energy domain solver, the accelerated relaxation algorithm can be used to determine the solution to the coupled systems, so it is a general approach for mixed energy domain simulation of MEMS. Computational comparison between relaxation and accelerated relaxation algorithm is given. Numerical result presented for cantilever beam over a ground plane shows that the accelerated relaxation algorithm is converge rapidly and is much faster as compared to the relaxation algorithm.
出处
《机械强度》
EI
CAS
CSCD
北大核心
2001年第4期500-502,共3页
Journal of Mechanical Strength
基金
西北工业大学"双新"项目资助
关键词
微电子机械系统
数值方法
加速松驰法
仿真
能量场
耦合
Micro electro mechanical system
Numerical technique
Accelerated relaxation algorithm
