摘要
针对此现象建立微型线振动陀螺仪结构不对称造成的静电力耦合误差模型以及梳齿变形模型,使用Matlab软件进行仿真分析.同时根据有限元分析的方法,使用ANSYS软件进行分析,得到由于结构不对称造成的电场分布图、静电力分布图和变形图.这些分析研究对提高微型线振动陀螺仪的精度起着非常重要的作用.
Aim at this phenomenon, the mechanical-electrical error model and the distortion model because of the asymmetry of the configuration of the MEMS line vibration gyroscope are built. There is simulation analysis by using Matlab. And according to the method of Limited Element, the distributing fig of the electric field and the electrostatic force and the distortion of combs because of the asymmetry of the configuration are got by using ANSYS. These researches act important effect on improving the precision of the MEMS line vibration gyroscope.
出处
《机电设备》
2009年第1期1-5,34,共6页
Mechanical and Electrical Equipment
